Several techniques are pivotal in nanofabrication:
- Photolithography: Uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical photoresist on the substrate. - Electron Beam Lithography (EBL): Utilizes focused beams of electrons to create extremely small patterns required for nanoscale devices. - Nanoimprint Lithography (NIL): Involves pressing a mold into a deformable material to create nanoscale patterns. - Self-Assembly: Leverages the natural organization of molecules to form ordered structures without external guidance.
